WE have carried out three searches of pentaquarks at CDF. First, we will present the search for a neutral pentaquark Theta_c which decays into D* and proton. This search has been performed using 240 pb-1 data samples of a displaced-two-track trigger. Second, we will present the search for a charged pentaquark Theta+ which decays into K0(s) and proton. This search has been performed using data samples of a minimum bias trigger and a jet trigger. Third, we will present the search for a doubly-charged pentaquark which decays into Xi and pi. This search has been performed using 220 pb-1 data samples of a displaced two-track trigger and a jet trigger.